Reaffirmed 2024

NATIONAL FOREWORD

This draft Indian Standard (Part 33) which is identical with IEC 60204-33 : 2009 ‘Safety of machinery — Electrical equipment of machines — Part 33: Requirements for semiconductor fabrication equipment’ issued by International Electrotechnical Commission (IEC) was adopted by the Bureau of Indian Standards on recommendation of the Safety of Machinery-Electrotechnical Aspect Sectional Committee and approval of the Electrotechnical Division Council.

The text of IEC Standard has been approved as suitable for publication as an Indian Standard without deviations. Certain terminologies and conventions are, however, not identical to those used in Indian Standards. Attention is particularly drawn to the following:

a) Wherever the words ‘International Standard’ appear referring to this standard, they should be read as ‘Indian Standard’.

b) Comma (,) has been used as a decimal marker, while in Indian Standards, the current practice is to use a point (.) as the decimal marker.